Publication Date
1988
Document Type
Paper
Abstract
A HeNe laser and a 45-90 degree prism with an index of refraction of 1.51 were used to study the prism coupling method of determining the thickness and index of refraction of thin films. This project involved the design and construction of a set-up that allowed for simple adjustment of the incident angle of the light. Based on the available prism, Si02 films were testable.
Recommended Citation
Hahn, Daniel J.
(1988)
"Thickness Measurements Using Prism Coupling,"
Journal of the Microelectronic Engineering Conference: Vol. 2:
Iss.
1, Article 17.
Available at:
https://repository.rit.edu/ritamec/vol2/iss1/17