Publication Date
1988
Document Type
Paper
Abstract
A computer program called CVPLOT, used at RIT to aid in the analysis of metal—oxide—semiconductor (MOS) capacitors, was recoded from REGIS graphics into the VAX Graphical Kernel System (GKS) allowing the user to obtain hardcopy plots of high and low frequency capacitance voltage curves from an HP—Plotter, LNO3 Laser Printer, and LA100 Line Printer. The revised program also allows changes to be made in the values of the ‘non—ideal’ (a nonzero flatband shift) parameters while subsequently observing the shift in the curve as a result of these changes. Curves for three different values of either substrate doping, gate oxide thickness, or temperature may also be superimposed on the same graph.
Recommended Citation
German, Richard A.
(1988)
"Software Analysis of Capacitance-Voltage Measurements,"
Journal of the Microelectronic Engineering Conference: Vol. 2:
Iss.
1, Article 16.
Available at:
https://repository.rit.edu/ritamec/vol2/iss1/16