Using a “shadow mask” technique, a single level metal 3-phase CCD shift register was fabricated with electrode separations of 2 microns. Testing is pending at this time.
Gardner, John P.
"Fabrication of a Single Level Metal CCD Shift Register,"
Journal of the Microelectronic Engineering Conference: Vol. 2
, Article 15.
Available at: http://scholarworks.rit.edu/ritamec/vol2/iss1/15