The goal of this project was to design and implement a MEMS process for the creation of a walking silicon robot using the equipment available at RIT. An attempt was carried out to create a mobility system based on the thermal expansion of polyimide joints as demonstrated by Ebefors. The designed process was successfully implemented through the oxidation of the joint surfaces. Issues with the Al resistor and polyimide lithography prevented the successful completion of the rest of the process.
Grund, David W. Jr and Fuller, Lynn F.
"A Walking Silicon Robot,"
Journal of the Microelectronic Engineering Conference: Vol. 18
, Article 6.
Available at: http://scholarworks.rit.edu/ritamec/vol18/iss1/6