A surface micromachined MEMS gas flow sensor has been fabricated and tested. The fabrication process of the device was presented. The heater glowed red hot when a voltage of 27V was applied if the underlying LTO was completely etched away. Both the upstream and downstream resistors changed when temperature changed. A proof of concept showing that output voltage changes with gas flow was shown.
Hwang, Vee Chee
"Fabrication and Characterization of a Packaged MEMS Gas Flow Sensor,"
Journal of the Microelectronic Engineering Conference: Vol. 14
, Article 16.
Available at: http://scholarworks.rit.edu/ritamec/vol14/iss1/16