This study presents a brief introduction to Auger Spectroscopy with experimental results taken from a spectrometer donated by Kodak in 2000. The tool has been calibrated using materials with high electron energy signals, primarily Titanium and Gold. Analysis of thin film spectra include the materials Aluminum, Gold, Si~N4, Germanium, and Tungsten. Depth profile measurements were made using a groove-etch technique and ion bombardment sputtering of a multi-layer metal stack. Future work will involve enabling x-Ray spectroscopy capabilities of the tool and increasing sensitivity of measurements.
Fattu, Michael David
"Auger Electron Spectroscopy Calibration,"
Journal of the Microelectronic Engineering Conference: Vol. 13
, Article 24.
Available at: http://scholarworks.rit.edu/ritamec/vol13/iss1/24