An IBH personal computer was used es en eutorT'l8tic data equlsitlon system for obtaining capacitance voltage (CV) measurements. An HP4145 parameter analyzer was used es en analog to digital converter end the resulting digitized CV data was analyzed on the VAX mainframe.
"Automated Capacitance-Voltage Measurement,"
Journal of the Microelectronic Engineering Conference: Vol. 1
, Article 35.
Available at: http://scholarworks.rit.edu/ritamec/vol1/iss1/35