Contrast Enhancement Material CCEM-388) was to be evaluated for a Perkin Elmer Micralign Projection System by comparing the contrasts for Kodak 820 positive photoresist with and without the use of the CEM. The contrast curve was determined from thickness versus log exposure graphs for various development times. A correlation between exposure dose and carriage speed of the Micralign System was investigated.
Muniak, Karen L.
"Contrast Enhancement Material Evaluation for a Micralign Projection System,"
Journal of the Microelectronic Engineering Conference: Vol. 1
, Article 22.
Available at: http://scholarworks.rit.edu/ritamec/vol1/iss1/22