An ANOVA and factorial designs for optimization were were compared using a hypothetical LPCVD process situation. The three factorial proved superior Boron diffusion was optimized using the three factorial design.
Mortellaro, James M.
"Design of Experiments and Diffusion Characterization,"
Journal of the Microelectronic Engineering Conference: Vol. 1
, Article 21.
Available at: http://scholarworks.rit.edu/ritamec/vol1/iss1/21