Publication Date
1987
Document Type
Paper
Abstract
An ANOVA and factorial designs for optimization were were compared using a hypothetical LPCVD process situation. The three factorial proved superior Boron diffusion was optimized using the three factorial design.
Recommended Citation
Mortellaro, James M.
(1987)
"Design of Experiments and Diffusion Characterization,"
Journal of the Microelectronic Engineering Conference: Vol. 1:
Iss.
1, Article 21.
Available at:
https://repository.rit.edu/ritamec/vol1/iss1/21