A procedure for making A vs v plots to analyze ellipsometer readings was generated. This replaced the look-up tables. The refractive index and thickness were generated using the Mccrackin Ellipsometer program.1 This program was debugged.
Bizri, Wael A.
"Analysis of Ellipsometer Measurements,"
Journal of the Microelectronic Engineering Conference: Vol. 1
, Article 2.
Available at: http://scholarworks.rit.edu/ritamec/vol1/iss1/2