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Title

The Effects of Internal Gettering on Bulk Generation Lifetime

Authors

James S. Lekas

Publication Date

1987

Document Type

Paper

Abstract

The effects of internal gettering on the bulk generation lifetime were investigated by examining the transient response of a MOS capacitor as it recovered from deep depletion to normal inversion. Unfortunately, test equipment limitations precluded the obtainment of quantitative measurement but qualitative differences were observed.

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