Optimization traditionally employs strategies of factorial design that have been shown to be lacking in efficiency. Research into evolutionary operation schemes, a more efficient technique, has been conducted and an alternative strategy for optimization proposed. The procedureis outlined and an application with the computer modeling program SUPREM II is discussed.
Layer, Todd J.
"Alternate Optimization of Process Parameters,"
Journal of the Microelectronic Engineering Conference: Vol. 1
, Article 15.
Available at: http://scholarworks.rit.edu/ritamec/vol1/iss1/15