This project is focused on fabricating a self containing 16 bit PMOS static RAM using 10µm minimum geometries. The basic structure was designed previously but changes had to be made to the CIF files which contained the circuit layout. Diffusion runs were added to allow for connections between inputs /outputs and pads. Alignment marks were also added. MANN files were generated, from which reticles, and finally, the masks were made. The process used to fabricate the SRAM was modelled on SUPREM. SPICE was used to determine the threshol voltage and read/write time. The circuit was then fabricated and tested.
Lange, Douglas J.
"Design and Fabrication of a Sixteen Bit PMOS Static RAM,"
Journal of the Microelectronic Engineering Conference: Vol. 1
, Article 14.
Available at: http://scholarworks.rit.edu/ritamec/vol1/iss1/14