This paper discusses the use of a systems theory, design coverage and control topics in nanotechnology and microelectromechanical systems (MEMS) courses developed and offered in the College of Engineering in RIT. The multidisciplinary nano and microengineering have accomplished a phenomenal growth over the last twenty years due to the rapid advances in microelectronics, molecular technologies, bulk and surface micromachining, computer-aided-design (CAD), etc. Recent fundamental and applied research and developments in molecular electronics and informatics have been notably contributed to the current progress. Enabling nano/micro engineering utilizes and depends on the fundamentals, software and hardware. These prominent developments largely depend on modern engineering and science providing the end-users with the needed technologies and design concurrency. With the increasing demands in high-performance envisioned nanosystems and emerged microsystems, designers apply new concepts. The role of nanotechnology and MEMS courses in the engineering curriculum is examined. We discuss the integration of design, optimization, control and analysis topics in Nano Science, Engineering and Technology (NanoSET) and MEMS courses. The MEMS curriculum consists of three courses, e.g., MEMS design, MEMS fabrication and MEMS systems evaluation. We stress the need for systems theory, in addition to basic fundamentals coverage and fabrication emphasis. The developed courses ensure the overall educational, professional and curriculum objectives.

Date of creation, presentation, or exhibit



Proceedings of the 46th IEEE Conference on Decision and Control New Orleans, LA, USA, Dec. 12-14, 2007 Copyright 2007 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE. ISBN: 978-1-4244-1497-0Note: imported from RIT’s Digital Media Library running on DSpace to RIT Scholar Works in February 2014.

Document Type

Conference Proceeding

Department, Program, or Center

Microelectronic Engineering (KGCOE)


RIT – Main Campus