The fundamentals, operation and functionality of MEMS and their components can be envisioned to be devised and prototyped through biomimetics. Examining actuation, sensing, processing and other key functions, we focus on the pilot studies of efficient hardware and software which are inherently possessed and exhibited by living biosystems. There are a great number of unsolved fundamental and technological problems. To some extent, a number of problems can be attacked by examining and attempting to utilize different biomolecular-centered actuation, sensing and processing solutions. BioMEMS and processing platforms are examined due to their superior performance and unprecedented capabilities. However, non-comprehended cellular phenomena and mechanisms in biosystems are emphasized. This paper documents novel MEMS devices and systems which can be designed utilizing some phenomena and effects observed in biosystems. The performance estimates are reported.

Date of creation, presentation, or exhibit



Copyright 2007 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE. ISBN: 978-966-553-614-7Note: imported from RIT’s Digital Media Library running on DSpace to RIT Scholar Works in February 2014.

Document Type

Conference Proceeding

Department, Program, or Center

Microelectronic Engineering (KGCOE)


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