Our group is developing atmospheric microplasma deposition method using a metal wire as raw materials. In this method, a metal wire inserted in a microplasma generation nozzle is etched or evaporated by the generated microplasma, and the resultant active species are transported downstream and condensed on a localized area of the substrate [1-3]. However in this process, the resultant active species were inevitably oxidized by Oxygen trapped in ambient air. Accordingly this method was useful for preparation of metal oxide nanoparticles (tungsten oxide and molybdenum oxide) and their deposition on a localized specific area of micron size in diameter. However, we could not apply this method to the deposition of metal nanopartciles. Recently, we improved this method and found the feasibility of the deposition of metallic molybdenum (Mo) particles in ambient air. In this paper, we will report the details of the deposition process and the unique structure of metallic Mo particles obtained under specific conditions.

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Microelectronic Engineering (KGCOE)


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