In this paper, design, fabrication and evaluation of an electromagnetic MEMS micropump actuator are reported. Based on MEMS technology, the proposed micropump actuator is designed and fabricated using integrated surface and bulk micromachining at the Microfabrication Facility at the Rochester Institute of Technology. A thin silicon diaphragm with a planar spiral coil ensures the desired degree of robustness and guarantees the specified volumetric changes. The magnetic force is generated due to the interaction between the magnetic field of a permanent magnet and current in the coil. The experimental results are reported.

Date of creation, presentation, or exhibit



MEMSTECH'2006, May 24-27, 2006, Lviv-Polyana, Ukraine Copyright 2006 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE. ISBN: 966-553-517-XNote: imported from RIT’s Digital Media Library running on DSpace to RIT Scholar Works in February 2014.

Document Type

Conference Proceeding

Department, Program, or Center

Microelectronic Engineering (KGCOE)


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