In this paper we examine high-performance micro-opto-electro-mechanical systems (MOEMS). The studied MOEMS composed from optoelectromagnetic active high-refractive index thin-film crystals, radiating energy devices (antenna), variable-wavelength vertical cavity surface emitting laser (VCSEL), and driving/controlling integrated circuits (lCs). In order to steer and accurately position a beam, we vary the high-frequency electric field and light wavelength. Experimental, applied and fundamental results are reported.
Date of creation, presentation, or exhibit
Department, Program, or Center
Microelectronic Engineering (KGCOE)
Lyshevski, Marina and Lyshevski, Sergey, "MOEMS with thin-film crystals" (2006). Accessed from
RIT – Main Campus