In this paper we examine high-performance micro-opto-electro-mechanical systems (MOEMS). The studied MOEMS composed from optoelectromagnetic active high-refractive index thin-film crystals, radiating energy devices (antenna), variable-wavelength vertical cavity surface emitting laser (VCSEL), and driving/controlling integrated circuits (lCs). In order to steer and accurately position a beam, we vary the high-frequency electric field and light wavelength. Experimental, applied and fundamental results are reported.

Date of creation, presentation, or exhibit



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Document Type

Conference Proceeding

Department, Program, or Center

Microelectronic Engineering (KGCOE)


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