A critical aspect of semiconductor manufacturing is the design and analysis of material handling and production control polices to optimize fab performance. This research utilizes two simulations of SEMATECH fab data of actual production fabs. The hypothesis of this study is that both vehicle and machine dispatching rules and their interaction will have significant impact on fab performance. To test this hypothesis, a full factorial design experiment is performed. The vehicle and machine dispatching rules as well as their interaction are shown to have a significant impact.

Date of creation, presentation, or exhibit



In the Proceedings of the 2005 IEEE International Symposium on Semiconductor Manufacturing, pp. 84-87, Septmeber 2005 Note: imported from RIT’s Digital Media Library running on DSpace to RIT Scholar Works in February 2014.

Document Type

Conference Proceeding

Department, Program, or Center

Industrial and Systems Engineering (KGCOE)


RIT – Main Campus