A critical aspect of semiconductor manufacturing is the design and analysis of material handling and production control polices to optimize fab performance. As wafer sizes have increased, semiconductor fabs have moved to-ward the use of automated material handling systems (AMHS). However, the behavior of AMHS and the effects of AMHS on fab productivity is not well understood. This research involves the development of a design and analysis methodology for evaluating the throughput capacity of AMHS. A set of simulation experiments is used to evaluate the throughput capacity of an AMHS and the effects on fab performance measures. The analysis uses SEMATECH fab data for full semiconductor fabs to evaluate the AMHS throughput capacity.
Date of creation, presentation, or exhibit
Department, Program, or Center
Industrial and Systems Engineering (KGCOE)
Kuhl, Michael and Christopher, Julie, "Capacity analysis of automated material handling systems in semiconductor fabs" (2004). Accessed from
RIT – Main Campus