This paper addresses and solves complex electromagnetic-vibroacoustic problems for rotational microscale electromechanical motion devices (MEMDs). The results reported enable one to straightforwardly and explicitly apply fundamental concepts developed to utilize the full potential of MEMDs attaining optimal overall performance. The studied MEMDs are the electromagnetic-based rotational devices. Correspondingly, coherent analysis and design must be performed. We report novel paradigms integrating complex electromagnetic, electromechanical and vibro-acoustic nonlinear phenomena and effects. It is demonstrated that there is a need to design and optimize electromagnetic-electromechanical systems as well as to device novel MEMDs topologies and architectures.
Date of creation, presentation, or exhibit
Department, Program, or Center
Microelectronic Engineering (KGCOE)
Lyshevski, Sergey, "Integrated electromagnetic-vibroacoustic high-fidelity modeling, simulation and optimization of microelectromechanical motion devices" (2003). Accessed from
RIT – Main Campus