A simple null modulation-polarization method of measuring optical constants of metals has been adapted for operation with a KrF 248nm excimer laser. The approach requires only 3 optical components to extract the real and imaginary parts of the index of refraction (n,k). Experimental results will show good agreement to reference values for several metals (Cr, Au, Al) and Si.
Date of creation, presentation, or exhibit
Department, Program, or Center
Microelectronic Engineering (KGCOE)
Suleyman Turgut, Bruce W. Smith, "Direct measurement of optical constants of metals from a KrF excimer using polarization methods", Proc. SPIE 2439, Integrated Circuit Metrology, Inspection, and Process Control IX, (22 May 1995); doi: 10.1117/12.209235; https://doi.org/10.1117/12.209235
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