Significant progress has been made in nano- and microoptoelectromechanical systems (NOEMS and MOEMS) in last years. However, formidable challenges remain and novel design concepts are sought. The technologies has been developed to fabricate MOEMS that integrate nanostructures and nanodevices including mirrors, lenses, magnets, antennas, actuators, etc. We study MOEMS that integrate vertical cavity surface emitting laser (VCSEL), active optoelectromagnetic-active nanostructures (Bragg cells and optoelectromagnetic lenses), radiating energy nanodevices (antennas) and controlling/processing nanoscale integrated circuits (nanoICs). Ideally, this MOEMS should be designed and fabricated utilizing the Microsystem-on-Chip paradigm. This paper focuses on the fundamental problems in synthesis, system-level integration, high-fidelity modeling, heterogeneous simulation, data-intensive analysis and optimization. The results reported significantly contribute to newly emerging microoptosystems that can be used in wireless communication, laser scanners, optical interconnects, etc.
Date of creation, presentation, or exhibit
Department, Program, or Center
Microelectronic Engineering (KGCOE)
Lyshevski, Sergey and Lyshevski, Marina, "Nano- and microoptoelectromechanical systems and nanoscale active optics" (2003). Accessed from
RIT – Main Campus