Significant progress has been made in nano- and microoptoelectromechanical systems (NOEMS and MOEMS) in last years. However, formidable challenges remain and novel design concepts are sought. The technologies has been developed to fabricate MOEMS that integrate nanostructures and nanodevices including mirrors, lenses, magnets, antennas, actuators, etc. We study MOEMS that integrate vertical cavity surface emitting laser (VCSEL), active optoelectromagnetic-active nanostructures (Bragg cells and optoelectromagnetic lenses), radiating energy nanodevices (antennas) and controlling/processing nanoscale integrated circuits (nanoICs). Ideally, this MOEMS should be designed and fabricated utilizing the Microsystem-on-Chip paradigm. This paper focuses on the fundamental problems in synthesis, system-level integration, high-fidelity modeling, heterogeneous simulation, data-intensive analysis and optimization. The results reported significantly contribute to newly emerging microoptosystems that can be used in wireless communication, laser scanners, optical interconnects, etc.

Date of creation, presentation, or exhibit



Copyright 2003 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE. ISBN: 0-7803-7976-4Note: imported from RIT’s Digital Media Library running on DSpace to RIT Scholar Works in February 2014.

Document Type

Conference Proceeding

Department, Program, or Center

Microelectronic Engineering (KGCOE)


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