The topic of single phase liquid flow in submicron or nanochannels is a nascent field. There have only been a couple papers that have dealt with this area directly. The most probable reason for this is that currently most research in fluid mechanics or heat transfer is being focused on micron size channels. To help facilitate researchers to focus on this undeveloped area, this paper serves as a review for some of the micro-fabrication processes that will make it possible for engineers and scientists to study this field in greater detail.

Date of creation, presentation, or exhibit



2005 proceedings of the 3rd international conference on microchannels and minichannels. The original publication is available at . Note: imported from RIT’s Digital Media Library running on DSpace to RIT Scholar Works in February 2014.

Document Type

Conference Proceeding

Department, Program, or Center

Microsystems Engineering (KGCOE)


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