Documents from 2008
Development, fabrication, and characterization of a vertical-diffused MOS process for power RF applications, Kazuya Tokunaga
Documents from 2007
Development of Integrated Project Tracks for a College-Wide Multidisciplinary Engineering Design Program at RIT, Marcos Esterman, Dorin Patru, Vincent Amuso, Edward Hensel, and Mark Smith
Process development for integration of CoFeB/MgO-based magnetic tunnel junction (MTJ) device on silicon, Shrinivas Pandharpure
Application of soft computing techniques to estimate the effective Young's Modulus of thin film materials, Ajay Pasupuleti and Ferat Sahin
Development of tunnel diode devices and models for circuit design and characterization, David Pawlik
Fouling in silicon microchannel designs used for IC chip cooling and its mitigation, Jeffrey L. Perry
Decision theoretic agent design for personal rapid transit systems, Iheanyi Umez-Eronini and Ferat Sahin
Documents from 2006
Development of deep submicron CMOS process for fabrication of high performance 0.25 nm transistors, Michael Aquilino
Lossless Compression of Color Palette Images with One-Dimensional Techniques, Ziya Arnavut and Ferat Sahin
Design and development of a radiation hardened color video sensor charge injection device chip, Denis A. Baiko
Experimental Measurement of Photoresist Modulation Curves, Anatoly Bourov, Stewart Robertson, Bruce W. Smith, Michael Slocum, and Emil C. Piscani
Resist Process Window Characterization for the 45-nm Node Using an Interferometric Immersion microstepper, Anatoly Bourov, Stewart Robertson, Bruce W. Smith, Michael Slocum, and Emil C. Piscani
Effects of Beam Pointing Instability on Two-Beam Interferometric Lithography, Yongfa Fan, Anatoly Bourov, Michael Slocum, and Bruce W. Smith
Microelectronic engineering education for emerging frontiers, Santosh Kurinec, Dale Ewbank, Lynn Fuller, and Karl Hirschman
Electrical characterization and application of pulsed DC magnetron sputtered zirconium oxide, Michael R. Leathem
A charge control model for III-V HEMTs using a self-consistent numerical solution of the Schrodinger and Poisson equations, Melissa Manney
The Design of a small satellite launch system - a multidisciplinary capstone experience, Dorin Patru, Jeffrey Kozak, and Robert Bowman
H-Infinity Controller Design for Structural Damping, Darren Rowen and Mark A. Hopkins
Development and characterization of high performance transistors on glass, Robert Saxer
Evanescent Eave Imaging in Optical Lithograpy, Bruce W. Smith, Yongfa Fan, Jianming Zhou, Neal Lafferty, and Andrew Estroff
Automated Algorithm for the Identification of Artifacts in Mottled and Noisy Images, Onome Augustine Ugbeme, Eli S. Saber, Wencheng Wu, and Kartheek Chandu
Schottky Field Effect Transistors and Schottky CMOS Circuitry, Reinaldo Vega
Electrophoretic deposition of ferrite, Cody Washburn
Indium tin oxide (ITO) deposition, patterning and Schottky contact fabrication, Jianming Zhou
Three-Dimensional Imaging of 30-nm Nanospheres Using Immersion Interferometric Lithography, Jianming Zhou, Yongfa Fan, and Bruce W. Smith
Documents from 2005
Inversion Ranks for Lossless Compression of Color Palette Images, Ziya Arnavut and Ferat Sahin
Development of a porous silicon flow-through field effect sensing system for chemical and biological detection, Jeffrey Clarkson
0.18?m high performance CMOS process optimization, Zeki Gurcan
Silicon-on-insulator waveguide structures for electro-optic applications, Christopher Harvey
Hybrid Multivariable Controller Architecture, Mark A. Hopkins, David Smith, Phillip Vallone, and Richard Sandor
Integration of micromachined thermal thermal shear stress sensors with microchannels - design, fabrication and testing, Vinod Dilip Kulkarni
A Piecewise Linear Approximation D/A Converter for Small Format LCD Applications, Mark Reisiger
25nm Immersion Lithography at a 193nm Wavelength, Bruce W. Smith, Yongfa Fan, Michael Slocum, and Lena Zavyalova
Application of Particle Swarm Techniques in Sensor Network Configuration, Jason C. Tillett, Shanchieh Jay Yang, Raghuveer Rao, and Ferat Sahin
Darwinian particle swarm optimization, Jason Tillett, T. Rao, Ferat Sahin, and Raghuveer Rao
Documents from 2004
Photoresist Modulation Curves, Anatoly Bourov, Yongfa Fan, Frank C. Cropanese, and Bruce W. Smith
Immersion Microlithography at 193 nm with a Talbot Prism Interferometer, Anatoly Bourov, Yongfa Fan, Frank Cropanese, Neal Lafferty, Lena V. Zavyalova, Hoyoung Kang, and Bruce W. Smith
Three-Terminal Si-Based Negative Differential Resistance Circuit Element with Adjustable Peak-to-Valley Current Ratios Using a Monolithic Vertical Integration, Sung-Yong Chung, Niu Jin, Paul Berger, Ronghua Yu, Phillip E. Thompson, Roger Lake, Sean L. Rommel, and Santosh K. Kurinec
Synthetic Defocus for Interferometric Lithography, Frank C. Cropanese, Anatoly Bourov, Yongfa Fan, Jianming Zhou, Lena Zayalova, and Bruce W. Smith
ILSim: A Compact Simulation Tool for Interferometric Lithography, Yongfa Fan, Anatoly Bourov, Lena Zavyalova, Jianming Zhou, Andrew Estroff, and Bruce W. Smith
Study of Air Bubble Induced Light Scattering Effect On Image Quality in 193 nm Immersion Lithography, Yongfa Fan, Neal V. Lafferty, Anatoly Bourov, Lena Zavyalova, and Bruce W. Smith
Embedded charge for microswitch applications, Joanna Kiljan
Gray Assist Bar OPC, Neal Lafferty, Geert Vandenberghe, Bruce W. Smith, Matthew Lassiter, and Patrick M. Martin
A physics-based model of SiC-based MESFETs, Sankha Mukherjee
Generalized Design of Diffractive Optical Elements Using Neural Networks, Ajay Pasupuleti, Anand Gopalan, Ferat Sahin, and Mustafa A.G. Abushagur
Effects of sputter deposition parameters on stress in tantalum films with applications to chemical mechanical planarization of copper, Jeffrey L. Perry
Genetic Algorithm Parameter Optimization: Applied to Sensor Coverage, Ferat Sahin and Giuseppe Abbate
An Evolutionary Algorithmic Approach to Learning a Bayesian Network from Complete Data, Ferat Sahin, Jason C. Tillett, Raghuveer Rao, and T. M. Rao
A physics-based analytical model of an AlGaN/GaN high electron mobility transistor, Jonathan Sippel
Amphibian XIS: An Immersion Lithography Microstepper Platform, Bruce W. Smith, Anatoly Bourov, Yongfa Fan, Frank C. Cropanese, and Peter Hammond
Approaching the Numerical Aperture of Water - Immersion Lithography at 193nm, Bruce W. Smith, Anatoly Bourov, Yongfa Fan, Lena V. Zayvalova, Neal Vincent Lafferty, and Frank Charles Cropanese
Benefiting from Polarization - Effects on High-NA Imaging, Bruce W. Smith, Lena Zavyalova, and Andrew Estroff
A Distributed Evolutionary Algorithmic Approach to the Coverage Problem for Submersible Sensors, Jason C. Tillett, Raghuveer Rao, and Ferat Sahin
A Distributed Evolutionary Algorithmic Approach to the Least-Cost Connected Constrained Sub-Graph and Power Control Problem, Jason C. Tillett, Raghuveer Rao, Ferat Sahin, and T. M. Rao
Automated Aberration Extraction Using Phase Wheel Targets, Lena Zavyalova, Anatoly Bourov, and Bruce W. Smith
In-situ Aberration Monitoring Using Phase Wheel Targets, Lena V. Zavyalova, Bruce W. Smith, Toshifumi Suganaga, Seiji Matsuura, Toshiro Itani, and Julian S. Cashmore
Documents from 2003
Optical properties of materials for 157 nm lithography, Anatoly Bourov
Development of a fully-depleted thin-body FinFET process, Branislav Curanovic
Process development of a novel pseudo two-phase CCD pixel using transparent conduction oxide electrodes, Daniel Fullerton
Multidisciplinary Microrobotics Teaching Activities In Engineering Education, Ferat Sahin and Wayne Walter
Forbidden Pitch or Duty-Free: Revealing the Causes of Across-Pitch Imaging Differences, Bruce W. Smith
Water Immersion Optical Lithography for the 45nm Node, Bruce W. Smith, Hoyoung Kang, Anatoly Bourov, Frank Cropanese, and Yongfa Fan
The integration of Si-based resonant interband, Stephen Sudirgo
Concept, design, simulation, and fabrication of an ultra-scalable vertical MOSFET, Keith H. Tabakman
Particle Swarm Optimization for the Clustering of Wireless Sensors, Jason C. Tillett, Raghuveer Rao, Ferat Sahin, and T. Rao
Documents from 2002
Modeling and fabrication of optically resonant periodic structures, Charles Faisst Jr.
A Swarm intelligence based approach to the mine detection problem, Vignesh Kumar and Ferat Sahin
Polycrystalline silicon thermal actuators integrated with photodiode, Kevin Munger
AISIMAM – An Artificial immune system based intelligent multi agent model and its application to a mine detection problem, Srividhya Sathyanath and Ferat Sahin
Challenges in High NA, Polarization, and Photoresists, Bruce W. Smith and Julian S. Cashmore
OPC and Image Optimization Using Localized Frequency Analysis, Bruce W. Smith and Dale E. Ewbank
Image Enhancement through Square Illumination Shaping, Bruce W. Smith and Geert Vandenberghe
Documents from 2001
A Study of Obscuration in Catadioptric Lenses, Martin McCallum, Bruce W. Smith, Steve Bassett, Julian S. Cashmore, and James E. Webb
Documents from 2000
Design of RIT's sub-micron CMOS process, Suraj Bhaskaran
Documents from 1999
Process development and reliability of thin gate oxides, Keith Capasso
Documents from 1998
Luminescence Properties of Thin Film Ta2 Zn3 O8 and Mn Doped Ta2 Zn3 O8, Philip D. Rack, Michael D. Potter, Santosh Kurinec, Wounjhang Park, John Penczek, Brent K. Wagner, and Christopher J. Summers
Documents from 1997
Design and process development of an integrated phosphor field emission device, Robert Langley
Documents from 1996
Process design for charge-injection based imaging array fabrication, Michael Schippers
Documents from 1995
Photolithography Process Characterization and 3D Simulation Using Track-Mounted Development Rate Monitor Data, Saraubh Dutta-Chowdhury, David W. Alexander, Mark Goldman, Alan W. Kukas, Nigel R. Farrar, Clifford H. Takemoto, Bruce W. Smith, and Linard Karklin
Design, Synthesis, and Characterization of Poly(trimethylsilylmethyl methaciylate-co-chloromethyl styrene) for 193 nm Exposure, Bruce W. Smith, David A. Mixon, Anthony E. Novembre, and Shahid Butt
Direct Measurement of Optical Constants of Metals from a KrF Excimer Using Polarization Methods, Suleyman Turgut and Bruce W. Smith
Experimental verification of a novel system ID technique called PLID using a flexible 3-D structure, Phillip Vallone and Mark A. Hopkins
Documents from 1994
Extraction of Process Specific Photolithogtaphy Model Parameters, Patrick G. Drennan and Bruce W. Smith
Technique for the Measurement of the In-Situ Development Rate, Patrick G. Drennan, Bruce W. Smith, and David W. Alexander
Ion Implantation of Porous Silicon, C. Peng, Philippe M. Fauchet, J. M. Rehm, G. L. McLendon, F. Seiferth, and Santosh K. Kurinec
Characterization of Safe Solvent PMMA Resist Variables for Electron Beam Application, Bruce W. Smith, Todd Eakin, and Donald Johnson
Phase-Shift Mask Issues for 193 nm Lithography, Bruce W. Smith and Suleyman Turgut
Near Field Optical Microscopy Characterization of IC Metrology, Ricardo Toledo-Crow, Bruce W. Smith, Jon Rogers, and Mehdi Vaez-Iravani
Documents from 1993
Advanced Lithography Simulation Tools for Development and Analysis of Wide-Field High Numerical Aperture Projection Optical Systems, James E. Connors, Todd Kos, Robert C. Pack, and Bruce W. Smith
Response Surface Modeling of Rim Phase Shift Masks, Richard Holscher, Bruce W. Smith, and Steve K. Brainerd
Comparison of Scalar and Vector Diffraction Modelling for Deep-UV Lithography, Bruce W. Smith, Donis Flagello, Joseph R. Summa, and Lynn F. Fuller
A 193 nm Deep-UV Lithography System Using a Line-Narrowed ArF Excimer Laser, Bruce W. Smith, Malcolm Gower, Mark Westcott, and Lynn F. Fuller
Characterization of Atomic Force Microscopy and Electrical Probing Techniques for IC Metrology, Ricardo Toledo-Crow, Mehdi Vaez-Iravani, Bruce W. Smith, and Joseph Summa
Documents from 1992
Response Surface Modelling Utilizing Lithographic Process Simulation, Bruce W. Smith, Wai-Man Shiao, Richard D. Holscher, and Patricia F. Mahoney
Documents from 1987
A Multipurpose Test Mask for Exposure Tool Characterization, Brian Benamati
Documents from 1985
Short time spectrum analysis-synthesis of speech, Dusan Vujcic
Documents from 1979
An electronic switching system: a computer model for traffic study, Richard McInnes
A software development system for the Motorola M6800, John Michael Moore
Documents from 1977
The Design of Fail-Safe Logic, Harvey Becker
A digital signal processing system developed for the optimal use of high density magnetic storage media, Victor Hernandez
