The results of the combined experimental and numerical study suggest that nonequilibrium plasma-driven self-organization leads to better size and positional uniformity of nickel nanodot arrays on a Si 100 surface compared with neutral gas-based processes under similar conditions. This phenomenon is explained by introducing the absorption zone patterns, whose areas relative to the small nanodot sizes become larger when the surface is charged. Our results suggest that strongly nonequilibrium and higher-complexity plasma systems can be used to improve ordering and size uniformity in nanodot arrays of various materials, a common and seemingly irresolvable problem in self-organized systems of small nanoparticles.
Department, Program, or Center
Microelectronic Engineering (KGCOE)
Levchenko I, Ostrikov K, Diwan K, Winkler K, Mariotti D "Plasma-driven self-organization of Ni nanodot arrays on Si(100)" Applied Physics Letters 93 (2008) 183102 - selected for the Virtual Journal of Nanoscale Science & Technology (November 17, 2008)
RIT – Main Campus