In this paper, we report on the fabrications of Mo-oxide nanostructures and nanoarchitectures using an atmospheric-microplasma (AMP) system. This AMP system shows a high degree of flexibility and is capable of producing several different nanostructures and nanoarchitectures by varying the process parameters. The low-cost and simplicity of the process are important characteristics for nanomanufacturing, and AMP's offer such advantages. In addition, AMPs have shown the ability of promoting self-organization of nanostructures.
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Microelectronic Engineering (KGCOE)
Mariotti, Davide; Bose, Arumugam; and Ostrikov, Kostya, "Atmospheric-microplasma-assisted nanofabrication: Metal and metal-oxide nanostructures and nanoarchitectures" (2009). 2009 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE,Accessed from
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