The authors report the details of the deposition process and the unique structure of metallic Mo particles obtained under specific conditions. Results indicated that the surface of the as-deposited particles was oxidized, but the inside of the deposit is mostly metallic Mo. The microstructure of the star-shaped Mo particles was characterized with TEM and TED. The analysis of the complicated TED pattern indicated that the star-shaped Mo particles are five-fold symmetrical multiply twinned particle.

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©2007 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE. This material is presented to ensure timely dissemination of scholarly and technical work. Copyright and all rights therein are retained by authors or by other copyright holders. All persons copying this information are expected to adhere to the terms and constraints invoked by each author's copyright. In most cases, these works may not be reposted without the explicit permission of the copyright holder. DOI: 10.1109/IMNC.2007.4456160 This research was partially supported by a Grant-in-Aid for Scientific Research in Priority Areas: Generation of micro-scale reactive plasma and development of their new applications (microplasma), from the Ministry of Education, Culture, Sports, Science, and Technology, Japan. ISBN:978-4-9902472-4-9Note: imported from RIT’s Digital Media Library running on DSpace to RIT Scholar Works in February 2014.

Document Type


Department, Program, or Center

Microelectronic Engineering (KGCOE)


RIT – Main Campus