The authors report the details of the deposition process and the unique structure of metallic Mo particles obtained under specific conditions. Results indicated that the surface of the as-deposited particles was oxidized, but the inside of the deposit is mostly metallic Mo. The microstructure of the star-shaped Mo particles was characterized with TEM and TED. The analysis of the complicated TED pattern indicated that the star-shaped Mo particles are five-fold symmetrical multiply twinned particle.
Department, Program, or Center
Microelectronic Engineering (KGCOE)
Microprocesses and Nanotechnology, 2007 Digest of papers (2007) 174-175
RIT – Main Campus