The current trends in development and deployment of advanced micro- and miniscale electromechanical systems (MEMS) have facilitated the unified fundamental, applied, and experimental research activities in the analysis and design of state-of-the-art motion devices (rotational and translational electromechanical motion devices), integrated circuits (ICs), and controllers. The objectives of this paper are to design, develop, and compare different control algorithms for high-performance MEMS with permanent-magnet rotational servo-motors controlled by ICs (VLSI driver–controller is fabricated using CMOS technology). The problems to be solved are very challenging because a number of long-standing issues in design, hardware integration, control, nonlinear analysis, and robustness have to be solved. The major emphases of this paper are the analysis and design of robust servo-systems, as well as the comparison of the dynamic performance of closed-loop MEMS with different control algorithms. We synthesize, verify, and test proportional–integral, integral with state feedback extension, relay, and sliding mode controllers. It is illustrated that the sliding mode control laws drive the states and tracking error to the switching surface and maintain (keep) the states and tracking error within this nonlinear switching surface in spite of different references, disturbances, parameter variations, and uncertainties. That is, robust tracking, desired accuracy, and disturbance attenuation are achieved. We report the experimental setup which was built to perform the advanced studies of high-performance MEMS. The testbed was built to integrate permanent-magnet microscale servo-motor and ICs (driver–controller).

Publication Date



Copyright 2002 Elsevier.Please see http://www.sciencedirect.com for the complete article.Note: imported from RIT’s Digital Media Library running on DSpace to RIT Scholar Works in February 2014.

Document Type


Department, Program, or Center

Microelectronic Engineering (KGCOE)


RIT – Main Campus